Microelectro Mechanical Tunneling Switch

Microelectromechanical system (MEMS) switches have become increasingly important in the field of electronics because of their superior performance in terms of miniaturization, operational speed, power consumption, and integration capability. However, there is a pressing need for more reliable, controllable, and efficient MEMS switches. Current MEMS switches typically face challenges regarding robustness, reliability, and power consumption. Specifically, most conventional switches lack precision in the operation of their components, making them more susceptible to wear and tear and leading to equipment failure and inefficiencies in power use.

Technology Description

This technology is a microelectromechanical system switch, composed of a substrate embedded with multiple actuating electrodes. Each electrode can be activated independently. Attached to this substrate is a cantilever beam with stops formed on it, capable of engaging the substrate between the actuating electrodes. A contact area interacts with one end of the cantilever beam. What separates this technology from others is the method by which it operates. The design allows for a voltage to be applied to each actuating electrode independently, in sequence, starting from an electrode located adjacent to one end of the cantilever beam, toward an electrode next to the other end. This sequential engagement system means the stops can engage with the substrate between the actuating electrodes in a defined order, likely improving the control and reliability of the switch system.