Reliable large format arrays of Geiger-mode avalanche photodiodes
May 28, 2008
IPRM 2008, 20th Int. Conf. on Indium Phosphide and Related Materials, 25-29 May 2008.
The fabrication of reliable InP-based Geigermode avalanche photodiode arrays is described. Arrays of up to 256 x 64 elements have been produced and mated to silicon read-out circuits forming single-photon infrared focal plane imagers for 1.06 and 1.5 mum applications.