Publications
Immersion patterning down to 27 nm half pitch
Summary
Summary
Liquid immersion interference lithography at 157 nm has been used to print gratings of 27 nm half pitch with a fluorine-doped fused silica prism having index of 1.66. In order to achieve these dimensions, new immersion fluids have been designed and synthesized. These are partially fluorinated organosiloxanes with indexes up...
A wafer-scale 3-D circuit integration technology
Summary
Summary
The rationale and development of a wafer-scale three-dimensional (3-D) integrated circuit technology are described. The essential elements of the 3-D technology are integrated circuit fabrication on silicon-on-insulator wafers, precision wafer-wafer alignment using an in-house-developed alignment system, low-temperature wafer-wafer bonding to transfer and stack active circuit layers, and interconnection of the...
Lincoln Laboratory high-speed solid-state imager technology
Summary
Summary
Massachusetts Institute of Technology, Lincoln Laboratory (MIT LL) has been developing both continuous and burst solid-state focal-plane-array technology for a variety of high-speed imaging applications. For continuous imaging, a 128 ¿ 128-pixel charge coupled device (CCD) has been fabricated with multiple output ports for operating rates greater than 10,000 frames...
Coherent beam combining of large number of PM fibres in 2-D fibre array
Summary
Summary
Coherent combining of a record 48 PM fibres in a phased array configuration is reported. The resulting Strehl ratio degrades by
An end-to-end demonstration of a receiver array based free-space photon counting communications link
Summary
Summary
NASA anticipates a significant demand for long-haul communications service from deep-space to Earth in the near future. To address this need, a substantial effort has been invested in developing a free-space laser communications system that can be operated at data rates that are 10-1000 times higher than current RF systems...
Ultra-linear superwideband chirp generator using digital compensation
Summary
Summary
A novel digital compensation technique is applied to linearize the frequency generation of a superwideband chirp. Ultra-linear, low-noise swept local oscillators (SLO) are critical to the two-tone dynamic range performance of compressive receivers. The proposed technique enables full software control of the chirp linearity, slope, and offset to allow automated...
Afterpulsing in Geiger-mode avalanche photodiodes for 1.06um wavelength
Summary
Summary
We consider the phenomenon of afterpulsing in avalanche photodiodes (APDs) operating in gated and free-running Geiger mode. An operational model of afterpulsing and other noise characteristics of APDs predicts the noise behavior observed in the free-running mode. We also use gated-mode data to investigate possible sources of afterpulsing in these...
Laser radar imager based on 3D integration of Geiger-mode avalanche photodiodes with two SOI timing circuit layers
Summary
Summary
We have developed focal-plane arrays and laser-radar (ladar) imaging systems based on Geiger-mode avalanche photodiodes (APDs) integrated with high-speed all-digital CMOS timing circuits. A Geiger-mode APD produces a digital pulse upon detection of a single photon. This pulse is used to stop a fast digital counter in the pixel circuit...
250 mW, 1.5 um monolithic passively mode-locked slab-coupled optical waveguide laser
Summary
Summary
We report the demonstration of a 1.5 um InGaAsP mode-locked slab-coupled optical waveguide laser (SCOWL) producing 10 ps pulses with energies of 58 pJ and average output powers of 250 mW at a repetition rate of 4.29 GHz. To the best of our knowledge, this is the first passively mode-locked...
Engineering of the electrocapillary behavior of electrolyte droplets on thin fluoropolymer films
Summary
Summary
This study presents methods for engineering the electrocapillary behavior of fluoropolymer surfaces through the use of surfactants and an external insulating liquid. By the scaling of the appropriate surface energies, electrocapillary behavior is obtained at a record low voltage, with contact angle changes in excess of 100[degrees] at 4 V...