Steven A. Vitale

Dr. Steven A. Vitale is a senior staff member in the Advanced Materials and Microsystems Group, where he currently pursues novel device technologies enabled by diamond and two dimensional materials. In addition to these activities, his broader interests include ultralow power microelectronics, plasma science and technology for environmental, nanoelectronic, and medical applications.

Prior to joining Lincoln Laboratory, Vitale worked at Texas Instruments where he developed plasma processes for microelectronics manufacturing at the 90-nm, 65-nm, and 45-nm technology nodes. During his first five years at the Laboratory, he worked in the Advanced Silicon Technology Group developing processes and integration for fully depleted silicon-on-insulator transistors, electron-beam lenslet arrays, and novel solid-state radiation detectors.

Vitale has authored 74 publications and holds 10 issued patents. He has served on the executive committee for several international conferences including the IEEE Subthreshold Microelectronics Conference, the IEEE S3S Conference, and the AVS International Symposium.

Vitale received his PhD degree in chemical engineering from MIT, MS degree in nuclear engineering from MIT,  and his BS degree in chemical engineering from Johns Hopkins University.