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CW operation of monolithic arrays of surface-emitting AlGaAs diode lasers with dry-etched vertical facets and parabolic deflecting mirrors

Summary

A monolithic two-dimensional array of surface-emitting AlGaAs diode lasers with dry-etched vertical facets and parabolic deflecting mirrors was mounted junction-side up on a W / Cu microchannel heatsink and evaluated under continuous-wave (CW) operating conditions. Both the facets and parabolic deflecting mirrors were etched using chlorine ion-beam-assistd etching. Threshold current densities of different sections of the array were consistently around 240 A/cm (to the second power), and measured CW differential quantum efficiencies were in the 46-48% range. CW power densities as high as 148 W/cm (to the second power) were achieved with an average temperature rise of less than 25 degrees C in this junction-side-up configuration.
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Summary

A monolithic two-dimensional array of surface-emitting AlGaAs diode lasers with dry-etched vertical facets and parabolic deflecting mirrors was mounted junction-side up on a W / Cu microchannel heatsink and evaluated under continuous-wave (CW) operating conditions. Both the facets and parabolic deflecting mirrors were etched using chlorine ion-beam-assistd etching. Threshold current...

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