Publications

Microhydraulic actuators offer a new way to convert electrical power to mechanical power on a microscale with an unmatched combination of power density and efficiency. Actuators work by combining surface tension force contributions from a large number of droplets distorted by electrowetting electrodes. This paper reports on the behavior of microgram-scale linear and rotational microhydraulic actuators with output force/weight ratios of 5500, cycle frequencies of 4 kilohertz, <1-micrometer movement precision, and accelerations of 3 kilometers/second. The power density and the efficiency of the actuators were characterized by simultaneously measuring the mechanical work performed and the electrical power applied. Maximum output power density was 0.93 kilowatt/kilogram, comparable with the best electric motors. At maximum power, the actuator was 60% efficient, but efficiencies were as high as 83% at lower power. Rotational actuators demonstrated a torque density of 79 newton meters/kilogram, substantially more than electric motors of comparable diameter. Scaling the droplet pitch from 100 to 48 micrometers increased power density from 0.27 to 0.93 kilowatt/kilogram, validating the quadratic scaling of actuator power.

Microfabrication techniques were developed to create flexible 24 um thick glucose sensors on polyimide substrates. Measurements of the sensor performance, recorded as voltage potential, were carried out for a range of glucose concentrations (0 – 8 mM) in physiological saline (0.1 M NaCl, pH 7.4). The sensors show rapid response times (seconds to stable potential) and good sensitivity in the 0 – 4 mM range. Additionally, we demonstrate that the sensors can operate as fuel cells, generating peak power levels up to 0.94 uW/cm2. Such flexible devices, which can be rolled up to increase surface area within a fixed volume, may enable ultra-low-power bio-electronic implants for glucose sensing or glucose energy harvesting in the future.

We introduce a new type of actuator, the microhydraulic stepping actuator (MSA), which borrows design and operational concepts from biological muscle and stepper motors. MSAs offer a unique combination of power, efficiency, and scalability not easily achievable on the microscale. The actuator works by integrating surface tension forces produced by electrowetting acting on scaled droplets along the length of a thin ribbon. Like muscle, MSAs have liquid and solid functional components and can displace a large
fraction of their length. The 100 μm pitch MSA presented here already has an output power density of over 200 W kg− 1, rivaling the most powerful biological muscles, due to the scaling of surface tension forces, MSA’s power density grows quadratically as its dimensions are reduced.