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A nanoparticle convective directed assembly process for the fabrication of periodic surface enhanced Raman spectroscopy substrates

Summary

A highly scalable approach for producing surface-enhanced Raman spectroscopy substrates is introduced. The novel method involves assembling individual nanoparticles in pre-defined templates, one particle per template, forming a high denisity of nanogaps over large areas, while decoupling nanostructure synthesis from placement.
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Summary

A highly scalable approach for producing surface-enhanced Raman spectroscopy substrates is introduced. The novel method involves assembling individual nanoparticles in pre-defined templates, one particle per template, forming a high denisity of nanogaps over large areas, while decoupling nanostructure synthesis from placement.

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Immersion patterning down to 27 nm half pitch

Published in:
J. Vac. Sci. Technol. B, Microelectron. Process. Phenon., Vol. 24, No. 6, November/December 2006, pp. 2789-2797 (EIPBN 2006, 30 May-2 June 2006).

Summary

Liquid immersion interference lithography at 157 nm has been used to print gratings of 27 nm half pitch with a fluorine-doped fused silica prism having index of 1.66. In order to achieve these dimensions, new immersion fluids have been designed and synthesized. These are partially fluorinated organosiloxanes with indexes up to 1.5. Their absorbance is on the order of 0.4/um (base 10), enabling the use of liquid films with micron-size thickness. To utilize these semiabsorptive fluids, an immersion interference printer has been designed, built, and implemented for handling micron-scale liquid layers.
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Summary

Liquid immersion interference lithography at 157 nm has been used to print gratings of 27 nm half pitch with a fluorine-doped fused silica prism having index of 1.66. In order to achieve these dimensions, new immersion fluids have been designed and synthesized. These are partially fluorinated organosiloxanes with indexes up...

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