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Large-format Geiger-mode avalanche photodiode arrays and readout circuits

Published in:
IEEE J. Sel. Top. Quantum Electron., Vol. 24, No. 2, March/April 2018, 3800510.

Summary

Over the past 20 years, we have developed arrays of custom-fabricated silicon and InP Geiger-mode avalanche photodiode arrays, CMOS readout circuits to digitally count or time stamp single-photon detection events, and techniques to integrate these two components to make back-illuminated solid-state image sensors for lidar, optical communications, and passive imaging. Starting with 4 × 4 arrays, we have recently demonstrated 256 × 256 arrays, and are working to scale to megapixel-class imagers. In this paper, we review this progress and discuss key technical challenges to scaling to large format.
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Summary

Over the past 20 years, we have developed arrays of custom-fabricated silicon and InP Geiger-mode avalanche photodiode arrays, CMOS readout circuits to digitally count or time stamp single-photon detection events, and techniques to integrate these two components to make back-illuminated solid-state image sensors for lidar, optical communications, and passive imaging...

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Single-photon-sensitive solid-state image sensors for flash lidar

Author:
Published in:
CLEO 2016, Laser Science to Photonic Applications, 5-10 June 2016.

Summary

MIT Lincoln Laboratory has developed lidar systems based on Geiger-mode avalanche photodiodes using both silicon and InGaAs. This technology has enabled terrain mapping and foliage penetration systems with exquisite sensitivity and high area coverage rate.
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Summary

MIT Lincoln Laboratory has developed lidar systems based on Geiger-mode avalanche photodiodes using both silicon and InGaAs. This technology has enabled terrain mapping and foliage penetration systems with exquisite sensitivity and high area coverage rate.

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Geiger-mode avalanche photodiode arrays integrated to all-digital CMOS circuits

Author:
Published in:
Sensors, Vol. 16, No. 495, 2016, doi:10.3390/s16040495.

Summary

This article reviews MIT Lincoln Laboratory's work over the past 20 years to develop photon-sensitive image sensors based on arrays of silicon Geiger-mode avalanche photodiodes. Integration of these detectors to all-digital CMOS readout circuits enable exquisitely sensitive solid-state imagers for lidar, wavefront sensing, and passive imaging.
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Summary

This article reviews MIT Lincoln Laboratory's work over the past 20 years to develop photon-sensitive image sensors based on arrays of silicon Geiger-mode avalanche photodiodes. Integration of these detectors to all-digital CMOS readout circuits enable exquisitely sensitive solid-state imagers for lidar, wavefront sensing, and passive imaging.

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Silicon Geiger-mode avalanche photodiode arrays for photon-starved imaging

Author:
Published in:
SPIE, Vol. 9492, Advanced Photon Counting Techniques IX, 28 May 2015.

Summary

Geiger-mode avalanche photodiodes (GMAPDs) are capable of detecting single photons. They can be operated to directly trigger all-digital circuits, so that detection events are digitally counted or time stamped in each pixel. An imager based on an array of GMAPDs therefore has zero readout noise, enabling quantum-limited sensitivity for photon-starved imaging applications. In this review, we discuss devices developed for 3D imaging, wavefront sensing, and passive imaging.
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Summary

Geiger-mode avalanche photodiodes (GMAPDs) are capable of detecting single photons. They can be operated to directly trigger all-digital circuits, so that detection events are digitally counted or time stamped in each pixel. An imager based on an array of GMAPDs therefore has zero readout noise, enabling quantum-limited sensitivity for photon-starved...

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A study of crosstalk in a 256 x 256 photon counting imager based on silicon Geiger-mode avalanche photodiodes

Published in:
IEEE Sens. J., Vol. 15, No. 4, April 2015, pp. 2123-32.

Summary

We demonstrate a 256 x 256 passive photon counting imager based on hybridization of back-illuminated silicon Geiger-mode avalanche photodiodes to an all-digital CMOS counting chip. Photon detection efficiencies in the 10%-20% are observed at visible wavelengths. The detection efficiency is currently limited by optical crosstalk that leads to elevation of dark count rates as the bias voltage on the photodiodes is increased. Both the time dependence of dark count activity during a gate time and the spatial structure of dark images were successfully explained using crosstalk-based models.
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Summary

We demonstrate a 256 x 256 passive photon counting imager based on hybridization of back-illuminated silicon Geiger-mode avalanche photodiodes to an all-digital CMOS counting chip. Photon detection efficiencies in the 10%-20% are observed at visible wavelengths. The detection efficiency is currently limited by optical crosstalk that leads to elevation of...

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Detection statistics in Geiger-mode avalanche photodiode quad-cell arrays with crosstalk and dead time

Published in:
IEEE Sens. J., Vol. 15, No. 4, April 2015, pp. 2133-43.

Summary

The detection statistics of Geiger-mode photodetector subarrays with a combination of reset-time blocking loss and optical crosstalk are investigated. Closed-form expressions are obtained for the means and covariances of the numbers of counts in 2 x 2 subarrays (quad cells) used in Shack-Hartmann wavefront sensors. The predicted wavefront sensing precision is compared with that obtained with a charge-coupled device-based wavefront sensor with readout noise. The results of the theory are also used to predict photon transfer curves for the Geiger-mode device and these are compared with experiment.
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Summary

The detection statistics of Geiger-mode photodetector subarrays with a combination of reset-time blocking loss and optical crosstalk are investigated. Closed-form expressions are obtained for the means and covariances of the numbers of counts in 2 x 2 subarrays (quad cells) used in Shack-Hartmann wavefront sensors. The predicted wavefront sensing precision...

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A photon-counting detector for exoplanet missions

Published in:
SPIE Vol. 8151, Techniques and Instrumentation for Detection of Exoplanets V, 5 September 2011, 81510K.

Summary

This paper summarizes progress of a project to develop and advance the maturity of photon-counting detectors for NASA exoplanet missions. The project, funded by NASA ROSES TDEM program, uses a 256x256 pixel silicon Geiger-mode avalanche photodiode (GM-APD) array, bump-bonded to a silicon readout circuit. Each pixel independently registers the arrival of a photon and can be reset and ready for another photon within 100 ns. The pixel has built-in circuitry for counting photo-generated events. The readout circuit is multiplexed to read out the photon arrival events. The signal chain is inherently digital, allowing for noiseless transmission over long distances. The detector always operates in photon counting mode and is thus not susceptible to excess noise factor that afflicts other technologies. The architecture should be able to operate with shot-noise-limited performance up to extremely high flux levels, >106 photons/second/pixel, and deliver maximum signal-to-noise ratios on the order of thousands for higher fluxes. Its performance is expected to be maintained at a high level throughout mission lifetime in the presence of the expected radiation dose.
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Summary

This paper summarizes progress of a project to develop and advance the maturity of photon-counting detectors for NASA exoplanet missions. The project, funded by NASA ROSES TDEM program, uses a 256x256 pixel silicon Geiger-mode avalanche photodiode (GM-APD) array, bump-bonded to a silicon readout circuit. Each pixel independently registers the arrival...

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Silicon single photon imaging detectors

Published in:
SPIE Vol. 8155, Infrared Sensors, Devices, and Applications; Single Photon Imaging II, 21 August 2011, 81551C.

Summary

Single-photon imaging detectors promise the ultimate in sensitivity by eliminating read noise. These devices could provide extraordinary benefits for photon-starved applications, e.g., imaging exoplanets, fast wavefront sensing, and probing the human body through transluminescence. Recent implementations are often in the form of sparse arrays that have less-than-unity fill factor. For imaging, fill factor is typically enhanced by using microlenses, at the expense of photometric and spatial information loss near the edges and corners of the pixels. Other challenges include afterpulsing and the potential for photon self-retriggering. Both effects produce spurious signal that can degrade the signal-to-noise ratio. This paper reviews development and potential application of single-photon-counting detectors, including highlights of initiatives in the Center for Detectors at the Rochester Institute of Technology and MIT Lincoln Laboratory. Current projects include single-photon-counting imaging detectors for the Thirty Meter Telescope, a future NASA terrestrial exoplanet mission, and imaging LIDAR detectors for planetary and Earth science space missions.
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Summary

Single-photon imaging detectors promise the ultimate in sensitivity by eliminating read noise. These devices could provide extraordinary benefits for photon-starved applications, e.g., imaging exoplanets, fast wavefront sensing, and probing the human body through transluminescence. Recent implementations are often in the form of sparse arrays that have less-than-unity fill factor. For...

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MBE back-illuminated silicon Geiger-mode avalanche photodiodes for enhanced ultraviolet response

Published in:
SPIE Vol. 8033, Advanced Photon Counting Techniques V, 25 April 2011, 80330D.

Summary

We have demonstrated a wafer-scale back-illumination process for silicon Geiger-mode avalanche photodiode arrays using Molecular Beam Epitaxy (MBE) for backside passivation. Critical to this fabrication process is support of the thin (< 10 um) detector during the MBE growth by oxide-bonding to a full-thickness silicon wafer. This back-illumination process makes it possible to build low-dark-count-rate single-photon detectors with high quantum efficiency extending to deep ultraviolet wavelengths. This paper reviews our process for fabricating MBE back-illuminated silicon Geigermode avalanche photodiode arrays and presents characterization of initial test devices.
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Summary

We have demonstrated a wafer-scale back-illumination process for silicon Geiger-mode avalanche photodiode arrays using Molecular Beam Epitaxy (MBE) for backside passivation. Critical to this fabrication process is support of the thin ( 10 um) detector during the MBE growth by oxide-bonding to a full-thickness silicon wafer. This back-illumination process makes...

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Adaptive optics wavefront sensors based on photon-counting detector arrays

Published in:
Proc. SPIE Vol. 7736, Adaptive Optics Systems II, 27 June 2010, 773610.

Summary

For adaptive optics systems, there is a growing demand for wavefront sensors that operate at higher frame rates and with more pixels while maintaining low readout noise. Lincoln Laboratory has been investigating Geiger·mode avalanche photodiode arrays integrated with CMOS readout circuits as a potential solution. This type of sensor counts photons digitally within the pixel, enabling data to be read out at high rates without the penalty of readout noise. After a brief overview of adaptive optics sensor development at Lincoln Laboratory, we will present the status of silicon Geiger· mode·APD technology along with future plans to improve performance.
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Summary

For adaptive optics systems, there is a growing demand for wavefront sensors that operate at higher frame rates and with more pixels while maintaining low readout noise. Lincoln Laboratory has been investigating Geiger·mode avalanche photodiode arrays integrated with CMOS readout circuits as a potential solution. This type of sensor counts...

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